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OverviewThis study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS). Full Product DetailsAuthor: Robert P. DonovanPublisher: Taylor & Francis Inc Imprint: CRC Press Inc Dimensions: Width: 15.20cm , Height: 2.60cm , Length: 22.90cm Weight: 0.680kg ISBN: 9780824703806ISBN 10: 0824703804 Pages: 460 Publication Date: 14 March 2001 Audience: College/higher education , Professional and scholarly , Undergraduate , Postgraduate, Research & Scholarly Format: Hardback Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationRobert P. Donovan Tab Content 6Author Website:Countries AvailableAll regions |