Chemistry of Atomic Layer Deposition
Author:   Seán Thomas Barry
Publisher:   De Gruyter
ISBN:  

9783110712513


Pages:   113
Publication Date:   22 November 2021
Format:   Paperback
Availability:   Available To Order   Availability explained
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Chemistry of Atomic Layer Deposition


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Overview

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Full Product Details

Author:   Seán Thomas Barry
Publisher:   De Gruyter
Imprint:   De Gruyter
Weight:   0.214kg
ISBN:  

9783110712513


ISBN 10:   3110712512
Pages:   113
Publication Date:   22 November 2021
Audience:   College/higher education ,  Tertiary & Higher Education ,  Tertiary & Higher Education
Format:   Paperback
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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Seán Thomas Barry, Carleton University, Ottawa, Canada.

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