Characterization and Metrology for ULSI Technology 2000: International Conference

Author:   David G. Seiler ,  Alain C. Diebold ,  Thomas J. Shaffner ,  Robert McDonald
Publisher:   American Institute of Physics
Edition:   2001 ed.
Volume:   v. 550
ISBN:  

9781563969676


Pages:   723
Publication Date:   01 March 2001
Format:   Mixed media product
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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Characterization and Metrology for ULSI Technology 2000: International Conference


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Overview

The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm. Some of the challenges are materials-related, such as transistors with high-k dielectrics and on-chip interconnects made from copper and low-k dielectrics. The magnitude of these challenges demands special attention from those in the metrology and analytical measurements community. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing.This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continue the advances in semiconductor technology. It covers major aspects of the process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics.It provides a concise and effective portrayal of industry characterization needs and some of the problems that must be addressed by industry, academia, and government to continue the dramatic progress in semiconductor technology. It also provides a basis for stimulating practical perspectives and new ideas for research and development.

Full Product Details

Author:   David G. Seiler ,  Alain C. Diebold ,  Thomas J. Shaffner ,  Robert McDonald
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Edition:   2001 ed.
Volume:   v. 550
Dimensions:   Width: 21.10cm , Height: 4.30cm , Length: 23.00cm
Weight:   1.940kg
ISBN:  

9781563969676


ISBN 10:   156396967
Pages:   723
Publication Date:   01 March 2001
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Mixed media product
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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