Overview

Full Product Details

Author:   Vladislav Yu Vasilyev
Publisher:   Nova Science Publishers Inc
Imprint:   Nova Science Publishers Inc
Weight:   0.640kg
ISBN:  

9781624179594

ISBN 10:   1624179592
Pages:   222
Publication Date:   01 July 2013
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Available To Order  
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

Table of Contents

Introduction; Brief Historical Overview of BPSG Thin Film Research; Basic BPSG Film CVD Tools & Methodology; Basic BPSG CVD Kinetic Features; As-Deposited BPSG Film Step Coverage & Gap-Fill; Glass Film CVD Schemes; BPSG Film Industrial CVD Technology; Brief Review on BPSG Thin Film Analysis Techniques; BPSG Film Composition; BPSG Film Structure; Basic BPSG Film Properties; BPSG Film Flow Capability; BPSG Film Ambient Moisture Interaction; Defect Formation Phenomenon in BPSG Films; Interrelation of BPSG Film Deposition, Composition, Structure, & Properties; Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures; BPSG Film Composition Optimization; BPSG Film Durability; BPSG Films in Electronic Technologies; Conclusion; Index.

Reviews

Author Information

Tab Content 6

Author Website:  

Countries Available

All regions