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OverviewFull Product DetailsAuthor: Vladislav Yu VasilyevPublisher: Nova Science Publishers Inc Imprint: Nova Science Publishers Inc Weight: 0.640kg ISBN: 9781624179594ISBN 10: 1624179592 Pages: 222 Publication Date: 01 July 2013 Audience: College/higher education , Professional and scholarly , Postgraduate, Research & Scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Available To Order We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately. Table of ContentsIntroduction; Brief Historical Overview of BPSG Thin Film Research; Basic BPSG Film CVD Tools & Methodology; Basic BPSG CVD Kinetic Features; As-Deposited BPSG Film Step Coverage & Gap-Fill; Glass Film CVD Schemes; BPSG Film Industrial CVD Technology; Brief Review on BPSG Thin Film Analysis Techniques; BPSG Film Composition; BPSG Film Structure; Basic BPSG Film Properties; BPSG Film Flow Capability; BPSG Film Ambient Moisture Interaction; Defect Formation Phenomenon in BPSG Films; Interrelation of BPSG Film Deposition, Composition, Structure, & Properties; Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures; BPSG Film Composition Optimization; BPSG Film Durability; BPSG Films in Electronic Technologies; Conclusion; Index.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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