Advanced Processes for 193-nm Immersion Lithography
Author:   Yayi Wei ,  Robert L. Brainard
Publisher:   SPIE Press
Edition:   New ed.
Volume:   v. 189
ISBN:  

9780819475572


Pages:   360
Publication Date:   30 April 2009
Format:   Hardback
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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Advanced Processes for 193-nm Immersion Lithography


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Author:   Yayi Wei ,  Robert L. Brainard
Publisher:   SPIE Press
Imprint:   SPIE Press
Edition:   New ed.
Volume:   v. 189
Weight:   0.880kg
ISBN:  

9780819475572


ISBN 10:   0819475572
Pages:   360
Publication Date:   30 April 2009
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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