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Overview"This book is the Chinese version of the handbook ""Reactive gases, sputtering and magnetrons."" The book discusses all fundamental aspects of reactive magnetron sputtering. It includes chapters on sputtering, magnetron discharge, target processes, film growth and stress evolution. It also provide review question for each chapter. The last chapter is a practical guide." Full Product DetailsAuthor: Diederik Depla , 董 强Publisher: Lulu Press Inc Imprint: Lulu.com Dimensions: Width: 15.20cm , Height: 2.20cm , Length: 22.90cm Weight: 0.694kg ISBN: 9781470949464ISBN 10: 1470949466 Pages: 394 Publication Date: 21 December 2022 Audience: General/trade , General Format: Hardback Publisher's Status: Active Availability: Available To Order ![]() We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately. Language: Chinese Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |