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OverviewFull Product DetailsAuthor: Nicolas Posseme (CEA-LETI, Grenoble, France)Publisher: ISTE Press Ltd - Elsevier Inc Imprint: ISTE Press Ltd - Elsevier Inc Weight: 0.350kg ISBN: 9781785480966ISBN 10: 1785480960 Pages: 136 Publication Date: 18 January 2017 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Manufactured on demand ![]() We will order this item for you from a manufactured on demand supplier. Table of ContentsReviewsAuthor InformationNicolas Posseme is a Senior Research Scientist in MIcrotechnologie & Nanotechnology and Deputy Head of Plasma Etching & Stripping in the Silicon Technologies division at the CEA-LETI Laboratory in Grenoble, France. Tab Content 6Author Website:Countries AvailableAll regions |