Fundamentals of Nanoscale Film Analysis

Author:   Terry L Alford ,  L C Feldman ,  James W Mayer
Publisher:   Springer
ISBN:  

9780387510019


Pages:   352
Publication Date:   25 August 2008
Format:   Undefined
Availability:   Out of stock   Availability explained


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Fundamentals of Nanoscale Film Analysis


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Overview

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.

Full Product Details

Author:   Terry L Alford ,  L C Feldman ,  James W Mayer
Publisher:   Springer
Imprint:   Springer
Dimensions:   Width: 23.40cm , Height: 1.90cm , Length: 15.60cm
Weight:   0.494kg
ISBN:  

9780387510019


ISBN 10:   038751001
Pages:   352
Publication Date:   25 August 2008
Audience:   General/trade ,  General
Format:   Undefined
Publisher's Status:   Unknown
Availability:   Out of stock   Availability explained

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