Characterization and Metrology for Ulsi Technology 2005

Author:   David G. Seiler (National Institute of Standards and Technology) ,  Alain C. Diebold ,  Robert McDonald ,  Caroline R. Ayre
Publisher:   American Institute of Physics
Volume:   v.788
ISBN:  

9780735402775


Pages:   687
Publication Date:   01 September 2005
Format:   Hardback
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Characterization and Metrology for Ulsi Technology 2005


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Overview

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

Full Product Details

Author:   David G. Seiler (National Institute of Standards and Technology) ,  Alain C. Diebold ,  Robert McDonald ,  Caroline R. Ayre
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Volume:   v.788
Dimensions:   Width: 21.40cm , Height: 4.30cm , Length: 27.80cm
Weight:   1.891kg
ISBN:  

9780735402775


ISBN 10:   0735402779
Pages:   687
Publication Date:   01 September 2005
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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